390 (W) x 605 (D) x 593 (H)
Approximately 32 kg
- Single Pod Open/Close
- Multi Pod Open/Close
- Pod Stage Tilting
- Area Sensor Interlock
- Process Step Auto/Manual
- PLC & Touch Screen
- Power : 1Phase AC200~220V, 50/60Hz
1Phase AC100~120V, 50/60Hz
KOREAN
ENGLISH
CHINESE