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- RSP-200 Pod Loading Unit ; 5ea Pod Stock (RFID Reading)

- Mask Individual Information Save (Hand Barcode Reading)
- Mask Multi Box Loading Unit ; 5ea Mask Stock (Barcode Reading)
- Mask Transfer ATM Unit (Mask Flip 0° , 90° , 180° )
- Mask H-Lock Unit,  Fiber Optic Detection
- Mask Auto 'Pattern', 'Back' side judgment (Sensor)
- Mask Auto 'Pattern', 'Back' side judgment (Vision)
- Mask Auto Rotate Unit (0° , 90° , 180° , 270° ), Direction Vision Confirm
- Pod Open/Close Unit
- Pod Transfer Robot Unit
- PLC Control
- 2 PC Operation (HMI)
- CCTV Recorder (8ch, about 14 days save)
- Pod Stocker : 108ea Stock (RSP-200 Pod)
- ULPA Filter / Chemical Filter
- Fan Filter Unit
- Edit Recipe & Process Log Save
- GEM300 Communication Application
- Equipment Safety : SEMI S2, S8 Certification
- Pod Transfer Robot KCS Certification