- Mask Auto Align
- Control Mounting Pressure & Position & Speed   

- Pellicle Clip Auto Remover Unit

- Auto-align function by a vision system
- Mask Barcode & Pod RFID Reading
- Mask Auto Rotation : 0° , 90° , 180° , 270°
- Edit Recipe & Process Log Save
- GEM300 Communication Application
- PLC Control
- 2 PC Operation (HMI)
- CCTV Recorder (7ch, about 20days save)
- Pellicle Stocker : 30ea Pellicle Stock

  : Pellicle Loading Method (Pellicle Clip Included State)
- Mask Transfer : 6 Axis Clean Robot
- Pellicle Transfer : 4 Axis Clean Robot
- Load Port : 2 Port
- Pod Load/Unload : OHT (E84 Application)
- ULPA Filter
- Equipment Safety : CE or S2, S8 Certification