Pellicle Mounter

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MPM-6000V

※ MPM-6000V / MPM-6000V-U


  • 반도체 Wafer용 Photo Mask에 Pellicle을 자동으로 접착.
  • Photo Mask를 자동 Align하여 Pellicle Shift를 최소화.
    (Vision System)
  • 수동으로 Photo Mask 및 Pellicle을 Loading/Unloading
    하는 Semi Automation 장비.(6" Photo Mask 전용 장비)
  • Pellicle Mounting 압력을 균일하게 전달 및 표시.

SPECIFICATION

Dimension (mm)

- MPM-6000V    : 770 (W) x 350 (D) x 560 (H)

- MPM-6000V-U : 830 (W) x 680 (D) x 1280 (H)

Weight (kg)

- MPM-6000V    : Approximately 50 kg

- MPM-6000V-U : Approximately 130 kg

Pellicle Shift

≤150 ㎛

Pellicle Rotation

≤80 ㎛

Mounting Pressure1~30 kg
Mounting Time1~9999 sec

Mounting Method

- Mask Auto Align

- Control Mounting Pressure & Position & Speed

Equipment Condition

- Auto-align function by a vision system

- Edit Recipe & Process Log Save

- PLC Control
- Touch Screen & Switch Operation (HMI)

- 6" Photo Mask
- Equipment Safety : CE or S2, S8 Certification

Option

- PC

- Barcode Reading System  

Utility - Power : 1Phase AC200~220V, 50/60Hz
- Exhaust : Φ60 mm ( >100 Pa)