- Mask Heating
- Control Demounting Pressure & Range & Speed
- Auto-align Pellicle & Mask Clamping
- Auto Measuring Pellilce Adhesive Image by a Microscope system
- Down Direction Demounting
- ULPA Filter
- Mask Barcode & Pod RFID Reading
- Edit Recipe & Process Log Save - GEM300 Communication Application - PLC Control - PC Operation (HMI)- CCTV Recorder (4ch, about 20days save)
- Load Port : 2 Port- Mask Transfer Clean Robot
- Mask Flip (0° , 180°)
- Chemical Filter - Ionizer System
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