- 150 Model : 620 (W) x 530 (D) x 1320 (H)
- 200 Model : 714 (W) x 525 (D) x 1320 (H)
- 150 Model : Approximately 170 kg
- 200 Model : Approximately 231 kg
- Mask single Pod Open/Close
- Mask Loading/Unloading
- Auto Recovery
- Mask Protection Interface & Interlock
- Equipment safety : CE or S2,S8 Certification
- PLC & Touch Screen (HMI)
- Mask Rotate (0° , 90° , 180° , 270°)
- Mask Flip (0° , 180°)
- ULPA Filter
- Ionizer System
- Power : 1Phase AC200~220V, 50/60Hz
- Exhaust : ¼” ( >100 Pa)
KOREAN
ENGLISH
CHINESE