Pellicle Mounter

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MPM-6000

※ MPM-6000 / MPM-6000M


  • 반도체 Wafer용 Photo Mask에 Pellicle을 자동으로
    정밀하게 접착.
  • Pellicle Shift를 조절 할 수 있는 장치를 통하여 Pellicle
    Shift 조정.
  • 수동으로 Photo Mask 및 Pellicle을 Loading/Unloading.
    (Semi Automation)
  • 다양한 Pellicle Size 대응.
    → Photo Mask Size.(5″,6″,7″,9” 등)
  • Pellicle Mounting 압력을 균일하게 전달 및 표시.

SPECIFICATION

Dimension (mm)

- MPM-6000    : 770 (W) x 350 (D) x 560 (H)

- MPM-6000M : 770 (W) x 450 (D) x 681 (H)

Weight (kg)

- MPM-6000    : Approximately 50 kg

- MPM-6000M : Approximately 65 kg

Pellicle Shift

- 6025 Type : ≤200 ㎛

- 5"~9" Multi Type : ≤500 ㎛

Pellicle Rotation

- 6025 Type : ≤100 ㎛

- 5"~9" Multi Type : ≤150 ㎛

Mounting Pressure1~30 kg
Mounting Time1~9999 sec

Mounting MethodControl Mounting Pressure & Position & Speed
Equipment Condition

- Mask & Pellicle Manual Loading
- Edit Recipe & Process Log Save

- PLC Control
- Touch Screen & Switch Operation (HMI)

- 5",6",7" & 9" Photo Mask
- Equipment Safety : CE or S2, S8 Certification

Option

- PC

- Barcode Reading System  

Utility - Power : 1Phase AC200~220V, 50/60Hz
- Exhaust : Φ60 mm ( >100 Pa)