Pellicle Demounter

HOME > 제품소개 > 반도체 설비 > Pellicle Demounter > MPD-6000

MPD-6000

  • 반도체 Wafer용 Photo Mask에 접착되어진 Pellicle를
    전용 Pellicle Demount Jig를 사용하여 수동으로 제거.
    (5",6",7" & 9" 등)

SPECIFICATION

Dimension (mm)500 (W) x 600 (D) x 300 (H)
Weight (kg)Approximately 40 kg
Demounting Time1~9999 sec
Demounting Temperature25~200 ℃
Demounting Method

- Mask Heating

- Demounting Pellicle with a Pellicle Jig

Equipment Condition

- PLC Control
- Swith Operation

- 5",6",7" & 9" Photo Mask

Option

- Pellicle Demount Jig

Utility - Power : 1Phase AC200~220V, 50/60Hz
- CDA : ¼” (0.5 ~ 0.7 Mpa)