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ARP-6000

  • It packs the Photo Mask in the Reticle Pod at the
    individual case by automatic.
  • It's pressurizing N2 (or CDA) gas in the chamber to
    prevent from the particle contamination.
  • Using Pod : Single Pod.(RSP-150 / RSP-200)

SPECIFICATION

Dimension (mm)

1940 (W) x 1450 (D) x 1990 (H)

Weight (kg)

Approximately 400 kg

Remarks

- Single Pod Run

- Individual Case Run

- N2(or CDA) pressurizing in a chamber

- Auto Taping & Sealing

- Barcode Reading

Control System

- PLC & Touch Screen

Utility

- Power : 1Phase AC200~220V, 50/60Hz

- CDA(or N2) : ¼” (0.5~0.7 Mpa)
- Exhaust : Φ100 mm ( >300 Pa)