- Auto-align function by a vision system - Mask Barcode & Pod RFID Reading- Edit Recipe & Process Log Save - GEM300 Communication Application - PLC Control - PC Operation (HMI) - CCTV Recorder (4ch, about 20days save)- Mask Transfer : 6 Axis Clean Robot
- Load Port : 1 Port
- ULPA Filter- Equipment Safety : CE or S2, S8 Certification
- Chemical Filter - Ionizer System
- Mask Auto Rotation : 0° , 90° , 180° , 270°