Pellicle Mounter

HOME > PRODUCT > Semiconductor > Pellicle Mounter > APM-6200D

APM-6200D

  • It mounts the Pellicle precisely on the Photo Mask
    automatically.
  • It gets the results to the minimum Pellicle-Shift
    by aligning the Photo Mask.
  • It can improve the Registration (PID) of the Photo Mask.
  • It loads and unloads the Pellicle and the Photo Mask
    by the Clean Robot.
  • It mounts uniformly the Pellicle on the Photo Mask
    and displays the mounting pressure on screen.
  • Photo Mask Can be supplied using OHT.
  • It has the convenience of work and productivity
    imporvement. (Due to 15 Pellicle stocker function)

SPECIFICATION

Dimension (mm)2600 (W) x 1800 (D) x 2430 (H)
Weight (kg)Approximately 1700 kg
Pellicle Shift≤100 ㎛
Pellicle Rotation≤30 ㎛
Mounting Pressure0.3~30 kg
Mounting Time1~9999 sec
Mounting Speed0.1~1000 mm/min
Mounting Method - Mask Auto Align
- Control Mounting Pressure & Position & Speed
Equipment Condition - Auto-align function by a vision system
- Mask Barcode & Pod RFID Reading
- Mask Auto Rotation : 0° , 90° , 180° , 270°
- Edit Recipe & Process Log Save
- GEM300 Communication Application
- PLC Control
- 2 PC Operation (HMI)
- CCTV Recorder (4ch, about 20days save)
- Pellicle Stocker : 12ea~15ea Pellicle Stock
- Mask Transfer : 6 Axis Clean Robot
- Pellicle Transfer : 4 Axis Clean Robot
- Load Port : 2 Port
- Pod Load/Unload : OHT (E84 Application)
- ULPA Filter
- Equipment Safety : CE or S2, S8 Certification
Option - Chemical Filter
- Ionizer System
Utility - Power : 1Phase AC200~220V, 50/60Hz
- CDA : ¼” (0.5~0.7 Mpa)
- Exhaust : Φ100 mm ( >300 Pa)