- Mask Heating
- Control Demounting Pressure & Range & Speed
- Auto-align Pellicle & Mask Clamping
- Auto Measuring Pellilce Adhesive Image by a Microscope system
- Upper Direction Demounting
- Mask Barcode & Pod RFID Reading
- Edit Recipe & Process Log Save- GEM300 Communication Application - PLC Control- PC Operation (HMI)- CCTV Recorder (4ch, about 20days save)
- 6" Photo Mask
- Equipment safety : CE or S2,S8 Certification
- ULPA Filter
- Chemical Filter - Ionizer System
- SMIF System