Pellicle Demounter

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MPD-6000

  • It is an equipment to demount the pellicle on the
    Photo Mask by manual.
  • It can demount the pellicle on the various Photo Mask
    that the customer uses to. (5",6",7" & 9" and so on)

SPECIFICATION

Dimension (mm)500 (W) x 600 (D) x 300 (H)
Weight (kg)Approximately 40 kg
Demounting Time1~9999 sec
Demounting Temperature25~200 ℃
Demounting Method

- Mask Heating

- Demounting Pellicle with a Pellicle Jig

Equipment Condition

- PLC Control
- Swith Operation

- 5",6",7" & 9" Photo Mask

Option

- Pellicle Demount Jig

Utility - Power : 1Phase AC200~220V, 50/60Hz
- CDA : ¼” (0.5 ~ 0.7 Mpa)