Pellicle Demounter

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APD-6000SR

  • It demounts the Pellicle on the Photo Mask
    automatically.
  • It can remove completely the Photo Mask to have
    Pellicle-Shift.(500㎛)
  • It takes a picture automatically for the Pellicle Adhesive
    Residue (32 points) after demounting the Pellicle.
  • It can control the demounting condition to remain
    the minimum Adhesive Residue on the Photo Mask.
  • It loads and unloads the Photo Mask by the
    Clean Robot. (Pattern Down Loading)
  • It's the automation system to load and unload
    the Reticle SMIF Pod by OHT.

SPECIFICATION

Dimension (mm)1300 (W) x 2000 (D) x 2080 (H)
Weight (kg)Approximately 650 kg
Demounting Accuracy≤500 ㎛
Demounting Torque0.3~15 kg
Demounting Time1~9999 sec
Demounting Temperature25~200 ℃
Demounting Method

- Mask Heating

- Control Demounting Pressure & Range & Speed

- Auto-align Pellicle & Mask Clamping

- Auto Measuring Pellilce Adhesive Image by a Microscope system

- Down Direction Demounting

Equipment Condition

- ULPA Filter

- Mask Barcode & Pod RFID Reading

- Edit Recipe & Process Log Save
- GEM300 Communication Application
- PLC Control
- PC Operation (HMI)
- CCTV Recorder (4ch, about 20days save)

- Load Port : 1 Port
- Mask Transfer Clean Robot

- Mask Flip (0° , 180°)

Option

- Chemical Filter
- Ionizer System 

Utility - Power : 1Phase AC200~220V, 50/60Hz
- CDA : ¼” (0.5~0.7 Mpa)
- Exhaust : Φ100 mm ( >100 Pa)