Pellicle Mounter

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MPM-6000

※ MPM-6000 / MPM-6000M


  • It mounts the Pellicle precisely on the Photo Mask
    automatically.
  • It can control Pellicle-Shift by adjusting the parts to
    move the Photo Mask.
  • It loads and unloads the Pellicle and the Photo Mask
    by manual.
  • It can mount the various pellicle on the Photo Mask
    that the customer uses to.(5",6",7",9" and so on)
  • It mounts uniformly the Pellicle on the Photo Mask
    and displays the mounting pressure on screen.

SPECIFICATION

Dimension (mm)

- MPM-6000    : 770 (W) x 350 (D) x 560 (H)

- MPM-6000M : 770 (W) x 450 (D) x 681 (H)

Weight (kg)

- MPM-6000    : Approximately 50 kg

- MPM-6000M : Approximately 65 kg

Pellicle Shift

- 6025 Type : 200 ㎛

- 5"~9" Multi Type : 500 ㎛

Pellicle Rotation

- 6025 Type : 100 ㎛

- 5"~9" Multi Type : 150 ㎛

Mounting Pressure1~30 kg
Mounting Time1~9999 sec

Mounting MethodControl Mounting Pressure & Position & Speed
Equipment Condition

- Mask & Pellicle Manual Loading
- Edit Recipe & Process Log Save

- PLC Control
- Touch Screen & Switch Operation (HMI)

- 5",6",7" & 9" Photo Mask
- Equipment Safety : CE or S2, S8 Certification

Option

- PC

- Barcode Reading System  

Utility - Power : 1Phase AC200~220V, 50/60Hz
- Exhaust : Φ60 mm ( >100 Pa)