622 (W) x 571 (D) x 1090 (H)
Approximately 145 kg
- Mask single Pod Open/Close
- Mask Rotate (0° , 90° , 180° , 270°)
- Mask Flip (0° , 180°)
- Auto Recovery
- Mask Protection Interface & Interlock
- PLC & Touch Screen (HMI)
- ULPA Filter
- Ionizer System
- Power : 1Phase AC200~220V, 50/60Hz
- Exhaust : ¼” ( >100 Pa)
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