Pellicle Mounter

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APM-6000

  • 在半导体Wafer用 Photo Mask上，自动紧密胶合 Pellicle。
  • 自动Align Photo Mask，最少化Pellicle Shift。
    (Vision 系统)
  • 精密调整Mounting工序，提高Mask Registration。(PID)
  • Loading/Unloading Photo Mask 及 Pellicle。
    (使用Clean Robot)
  • 均等传达并显示Pellicle Mounting压力。

SPECIFICATION

Dimension (mm)2000 (W) x 1600 (D) x 2200 (H)
Weight (kg)Approximately 1200 kg
Pellicle Shift≤100 ㎛
Pellicle Rotation≤30 ㎛
Mounting Pressure0.3~30 kg
Mounting Time1~9999 sec
Mounting Speed0.1~1000 mm/min
Mounting Method - Mask Auto Align
- Control Mounting Pressure & Position & Speed
Equipment Condition

- Auto-align function by a vision system
- Mask Barcode & Pod RFID Reading
- Edit Recipe & Process Log Save
- GEM300 Communication Application
- PLC Control
- PC Operation (HMI)
- CCTV Recorder (4ch, about 20days save)
- Mask Transfer : 6 Axis Clean Robot

- Load Port : 1 Port

- ULPA Filter
- Equipment Safety : CE or S2, S8 Certification

Option

- Chemical Filter
- Ionizer System

- Mask Auto Rotation : 0° , 90° , 180° , 270°  

Utility - Power : 1Phase AC200~220V, 50/60Hz
- CDA : ¼” (0.4~0.7 Mpa)
- Exhaust : Φ100 mm ( >300 Pa)